Development of an optical pickup system for measuring the displacement of the micro cantilever in scanning probe microscope

Kuang Yuh Huang*, En Tc Hwu, Hsin Yi Chow, Shao-Kang Hung

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

Abstract

This paper is to present the development and the verification of a compact optical sensor system for measuring the displacement of the micro cantilever In scanning probe microscope (SPM). An optical pickup head of commercial compact disc (CD)/disk versatile disc (DVD) read only memory (ROM) drive is applied in this displacement sensor system. For fulfilling our tight measuring requirements of sensibility and reliability, the build-in detection device h replaced with a four-quadrant photodiode. The developed system is well functionally verified by measuring calibration sample of 463 nm (pitch) × 30nm (height).

Original languageEnglish
Title of host publicationProceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Pages695-698
Number of pages4
DOIs
StatePublished - 1 Dec 2005
Event2005 IEEE International Conference on Mechatronics, ICM '05 - Taipei, Taiwan
Duration: 10 Jul 200512 Jul 2005

Publication series

NameProceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Volume2005

Conference

Conference2005 IEEE International Conference on Mechatronics, ICM '05
CountryTaiwan
CityTaipei
Period10/07/0512/07/05

Keywords

  • CD
  • DVD
  • Pickup head
  • SPM

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