Development of absolutely radiant flux measurements with electrical calibrated microbolometer

Kuan Chou Hou*, Yang-Mang Ou, Jin-Chern Chiou

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Absolutely flux radiometer measurements was developed with a microbolometer by using MEMS technology including lithography and etching. The radiometer is calibrated with electrical energy and adopted for absolute power and temperature drift, the sensor is called electric calibrated micro bolometer (ECμB). Platinum is utilized to be a heater and a sensor at different layer, other electric isolation layers were used to separate signal from those two platinum layers. Those layers were integrated and constructed in a membrane which was formed by using TMAH etching solution. Accuracy of radiometer was identified that is proportional to ratio of electrical substitution power and radiant flux was measured with development of ECμB.

Original languageEnglish
Title of host publication2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Proceedings
Pages1464-1467
Number of pages4
DOIs
StatePublished - 25 Aug 2011
Event2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Binjiang, Hangzhou, China
Duration: 10 May 201112 May 2011

Publication series

NameConference Record - IEEE Instrumentation and Measurement Technology Conference
ISSN (Print)1091-5281

Conference

Conference2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011
CountryChina
CityBinjiang, Hangzhou
Period10/05/1112/05/11

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