Development of a three dimensional neural sensing device by a stacking method

Chih Wei Chang, Jin-Chern Chiou*

*Corresponding author for this work

Research output: Contribution to journalArticle

20 Scopus citations

Abstract

This study reports a new stacking method for assembling a 3-D microprobe array. To date, 3-D array structures have usually been assembled with vertical spacers, snap fasteners and a supporting platform. Such methods have achieved 3-D structures but suffer from complex assembly steps, vertical interconnection for 3-D signal transmission, low structure strength and large implantable opening. By applying the proposed stacking method, the previous techniques could be replaced by 2-D wire bonding. In this way, supporting platforms with slots and vertical spacers were no longer needed. Furthermore, ASIC chips can be substituted for the spacers in the stacked arrays to achieve system integration, design flexibility and volume usage efficiency. To avoid overflow of the adhesive fluid during assembly, an anti-overflow design which made use of capillary action force was applied in the stacking method as well. Moreover, presented stacking procedure consumes only 35 minutes in average for a 4 × 4 3-D microprobe array without requiring other specially made assembly tools. To summarize, the advantages of the proposed stacking method for 3-D array assembly include simplified assembly process, high structure strength, smaller opening area and integration ability with active circuits. This stacking assembly technique allows an alternative method to create 3-D structures from planar components.

Original languageEnglish
Pages (from-to)4238-4252
Number of pages15
JournalSensors
Volume10
Issue number5
DOIs
StatePublished - 1 May 2010

Keywords

  • Microassembly
  • Microprobe array
  • Three dimensional probe array

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