Development and characterization of a CMOS-MEMS accelerometer with differential lc-tank oscillators

Yi Chiu; Hao-Chiao Hong; Po Chih Wu

doi:10.1109/JMEMS.2013.2282419

Development and characterization of a CMOS-MEMS accelerometer with differential lc-tank oscillators

Yi Chiu, Hao-Chiao Hong, Po Chih Wu

Department of Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

This paper presents a CMOS-MEMS accelerometer based on differential LC-tank oscillators. Two LC-tank oscillators composed of differential MEMS capacitors and suspended inductors were designed and fabricated by standard TSMC 0.18 μm CMOS processes and post-CMOS dry etching. The outputs of the differential oscillators are mixed and the output frequency of the mixer is proportional to the capacitance change caused by the external acceleration. The device has been characterized and has a mechanical resonance frequency of 7 kHz, absolute sensitivity of 3.62 MHz/g, relative sensitivity of 1.9 × 10-3 f/ f0/g, in-axis nonlinearity of 1.2 %FS, bias stability of 2.1 mg, and average noise floor of 0.205-0.219 mg/ √ Hz in the frequency range of 15-250 Hz. [2013-0134].

Original language	English
Article number	6631467
Pages (from-to)	1285-1295
Number of pages	11
Journal	Journal of Microelectromechanical Systems
Volume	22
Issue number	6
DOIs	https://doi.org/10.1109/JMEMS.2013.2282419
State	Published - 1 Dec 2013

Keywords

Accelerometer
Allan's deviation
CMOS MEMS
Differential capacitor
Frequency output
LC tank oscillator

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10.1109/JMEMS.2013.2282419

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title = "Development and characterization of a CMOS-MEMS accelerometer with differential lc-tank oscillators",

abstract = "This paper presents a CMOS-MEMS accelerometer based on differential LC-tank oscillators. Two LC-tank oscillators composed of differential MEMS capacitors and suspended inductors were designed and fabricated by standard TSMC 0.18 μm CMOS processes and post-CMOS dry etching. The outputs of the differential oscillators are mixed and the output frequency of the mixer is proportional to the capacitance change caused by the external acceleration. The device has been characterized and has a mechanical resonance frequency of 7 kHz, absolute sensitivity of 3.62 MHz/g, relative sensitivity of 1.9 × 10-3 f/ f0/g, in-axis nonlinearity of 1.2 %FS, bias stability of 2.1 mg, and average noise floor of 0.205-0.219 mg/ √ Hz in the frequency range of 15-250 Hz. [2013-0134].",

keywords = "Accelerometer, Allan's deviation, CMOS MEMS, Differential capacitor, Frequency output, LC tank oscillator",

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N2 - This paper presents a CMOS-MEMS accelerometer based on differential LC-tank oscillators. Two LC-tank oscillators composed of differential MEMS capacitors and suspended inductors were designed and fabricated by standard TSMC 0.18 μm CMOS processes and post-CMOS dry etching. The outputs of the differential oscillators are mixed and the output frequency of the mixer is proportional to the capacitance change caused by the external acceleration. The device has been characterized and has a mechanical resonance frequency of 7 kHz, absolute sensitivity of 3.62 MHz/g, relative sensitivity of 1.9 × 10-3 f/ f0/g, in-axis nonlinearity of 1.2 %FS, bias stability of 2.1 mg, and average noise floor of 0.205-0.219 mg/ √ Hz in the frequency range of 15-250 Hz. [2013-0134].

AB - This paper presents a CMOS-MEMS accelerometer based on differential LC-tank oscillators. Two LC-tank oscillators composed of differential MEMS capacitors and suspended inductors were designed and fabricated by standard TSMC 0.18 μm CMOS processes and post-CMOS dry etching. The outputs of the differential oscillators are mixed and the output frequency of the mixer is proportional to the capacitance change caused by the external acceleration. The device has been characterized and has a mechanical resonance frequency of 7 kHz, absolute sensitivity of 3.62 MHz/g, relative sensitivity of 1.9 × 10-3 f/ f0/g, in-axis nonlinearity of 1.2 %FS, bias stability of 2.1 mg, and average noise floor of 0.205-0.219 mg/ √ Hz in the frequency range of 15-250 Hz. [2013-0134].

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