Design, fabrication, and package of mems-based image stabilizer for photographic cell phone applications

Jin-Chern Chiou; Chen Chun Hung; Chun Ying Lin

doi:10.1109/OMEMS.2010.5672155

Design, fabrication, and package of mems-based image stabilizer for photographic cell phone applications

Jin-Chern Chiou, Chen Chun Hung, Chun Ying Lin

Department of Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This work presents a MEMS-based image stabilizer applied for anti-shaking function in photographic cell phones. The proposed stabilizer is designed as a two axis decoupling XY stage and strong to suspend an image sensor. Based on the special designs of a hollow handle layer and a corresponding wire bonding assisted holder, electrical signals of the suspended image sensor can be sent out with signal springs. The longest traveling distance of the stabilizer is 25μm with 51V applied voltage and sufficient to resolve the anti-shaking problem in a three megapixel image sensor and with excellent decoupling capability.

Original language	English
Title of host publication	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Pages	121-122
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2010.5672155
State	Published - 1 Dec 2010
Event	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan Duration: 9 Aug 2010 → 12 Aug 2010

Publication series

Name	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

Conference

Conference	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Country	Japan
City	Sapporo
Period	9/08/10 → 12/08/10

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10.1109/OMEMS.2010.5672155

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Chiou, J-C., Hung, C. C., & Lin, C. Y. (2010). Design, fabrication, and package of mems-based image stabilizer for photographic cell phone applications. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (pp. 121-122). [5672155] (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). https://doi.org/10.1109/OMEMS.2010.5672155

Chiou, Jin-Chern ; Hung, Chen Chun ; Lin, Chun Ying. / Design, fabrication, and package of mems-based image stabilizer for photographic cell phone applications. 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. pp. 121-122 (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010).

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title = "Design, fabrication, and package of mems-based image stabilizer for photographic cell phone applications",

abstract = "This work presents a MEMS-based image stabilizer applied for anti-shaking function in photographic cell phones. The proposed stabilizer is designed as a two axis decoupling XY stage and strong to suspend an image sensor. Based on the special designs of a hollow handle layer and a corresponding wire bonding assisted holder, electrical signals of the suspended image sensor can be sent out with signal springs. The longest traveling distance of the stabilizer is 25μm with 51V applied voltage and sufficient to resolve the anti-shaking problem in a three megapixel image sensor and with excellent decoupling capability.",

author = "Jin-Chern Chiou and Hung, {Chen Chun} and Lin, {Chun Ying}",

year = "2010",

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doi = "10.1109/OMEMS.2010.5672155",

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Chiou, J-C, Hung, CC & Lin, CY 2010, Design, fabrication, and package of mems-based image stabilizer for photographic cell phone applications. in 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010., 5672155, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, pp. 121-122, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, Sapporo, Japan, 9/08/10. https://doi.org/10.1109/OMEMS.2010.5672155

Design, fabrication, and package of mems-based image stabilizer for photographic cell phone applications. / Chiou, Jin-Chern; Hung, Chen Chun; Lin, Chun Ying.

2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. p. 121-122 5672155 (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - This work presents a MEMS-based image stabilizer applied for anti-shaking function in photographic cell phones. The proposed stabilizer is designed as a two axis decoupling XY stage and strong to suspend an image sensor. Based on the special designs of a hollow handle layer and a corresponding wire bonding assisted holder, electrical signals of the suspended image sensor can be sent out with signal springs. The longest traveling distance of the stabilizer is 25μm with 51V applied voltage and sufficient to resolve the anti-shaking problem in a three megapixel image sensor and with excellent decoupling capability.

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Chiou J-C, Hung CC, Lin CY. Design, fabrication, and package of mems-based image stabilizer for photographic cell phone applications. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. p. 121-122. 5672155. (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). https://doi.org/10.1109/OMEMS.2010.5672155

Design, fabrication, and package of mems-based image stabilizer for photographic cell phone applications

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