Design, fabrication, and package of mems-based image stabilizer for photographic cell phone applications

Jin-Chern Chiou, Chen Chun Hung, Chun Ying Lin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This work presents a MEMS-based image stabilizer applied for anti-shaking function in photographic cell phones. The proposed stabilizer is designed as a two axis decoupling XY stage and strong to suspend an image sensor. Based on the special designs of a hollow handle layer and a corresponding wire bonding assisted holder, electrical signals of the suspended image sensor can be sent out with signal springs. The longest traveling distance of the stabilizer is 25μm with 51V applied voltage and sufficient to resolve the anti-shaking problem in a three megapixel image sensor and with excellent decoupling capability.

Original languageEnglish
Title of host publication2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Pages121-122
Number of pages2
DOIs
StatePublished - 1 Dec 2010
Event2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan
Duration: 9 Aug 201012 Aug 2010

Publication series

Name2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

Conference

Conference2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
CountryJapan
CitySapporo
Period9/08/1012/08/10

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