Design, fabrication, and actuation of micro-electro-mechanical system-based image stabilizer

Jin-Chern Chiou, Chen Chun Hung*, Chun Ying Lin, Yung Jiun Lin

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


In this investigation, we present a two dimensional high aspect ratio XY stage, designed as an image stabilizer. This stabilizer is 8 × 8 × 0:75 mm3, and sufficiently strong to support a suspended image sensor for anti-shaking photographic function. This stabilizer is fabricated by the silicon-on-glass (SOG) process including inductively coupled plasma reactive ion etching (ICP-RIE) processes, in which the anchor layer, pre-etching layer and structure layers are identified without an additional release step as is required in traditional silicon-on-insulator (SOI) wafer etching process. When an actuator is fabricated, flip-chip bonding is adopted to attach a 3 megapixel image sensor to this device. The longest calculated traveling distance of the stabilizer is 25μm and special stoppers are designed to prevent the actuator from moving out of range, and sticking to the side by pull-in phenomenon. Accordingly, the applied voltage at the 25μm moving distance is 84 V. Furthermore, the dynamic resonant frequency of the actuating device with an image sensor is 1.013 kHz.

Original languageEnglish
Article number014201
JournalJapanese Journal of Applied Physics
Issue number1 Part 1
StatePublished - 20 Jan 2010

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