Design and simulation of a new dual-axis control input piezoelectric gyroscope

Cheng Yang Chang, Tsung-Lin Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper proposed a new design of the dual-axis control input, dual-axis position measurement piezoelectric gyroscope. Using piezoelectric actuation/ sensing to implement this gyroscope can be much more difficult than the conventional gyroscope, which equips only single-axis control input and dual-axis position measurement. This is because multiple mode shapes may exist in the flexure deformation, which complicates the relation between flexure deformation and the proof mass position. This paper solves this multiple-mode-shape problem by designing the location and dimensions of the electrodes such that the piezoelectric force would not excite multiple mode shapes and the voltage output of the sensing electrodes responds only to specific mode shapes. The proposed design achieves a sensitivity of 8 μv/deg/sec for the angular rate sensing and a quadrature error of 0.007%. The low quadrature error could be one of the advantages of sensing the position of the proof mass via sensing the specific deformed shape of the flexure.

Original languageEnglish
Title of host publicationProceedings of 2016 7th International Conference on Mechanical and Aerospace Engineering, ICMAE 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages274-278
Number of pages5
ISBN (Electronic)9781467388290
DOIs
StatePublished - 23 Aug 2016
Event7th International Conference on Mechanical and Aerospace Engineering, ICMAE 2016 - London, United Kingdom
Duration: 18 Jul 201620 Jul 2016

Publication series

NameProceedings of 2016 7th International Conference on Mechanical and Aerospace Engineering, ICMAE 2016

Conference

Conference7th International Conference on Mechanical and Aerospace Engineering, ICMAE 2016
CountryUnited Kingdom
CityLondon
Period18/07/1620/07/16

Keywords

  • cross-axis coupling
  • drstone@kist.re.krpiezoelectric gyroscope
  • dual-axis control input
  • piezoelectric actuation
  • piezoelectric position sensing
  • quadrature error

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