Design and fabrication of aspherical bimorph PZT optics

T. C. Tseng, Shean-Jen Chen*, Z. C. Yeh, S. Y. Perng, D. J. Wang, C. K. Kuan, J. R. Chen, C. T. Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


Bimorph piezoelectric optics with a third-order-polynomial surface is designed and a prototype is fabricated as active optics. Two pairs of silicon (Si) and lead zirconate titanate (PZT) piezoelectric ceramic are bonded as Si-PZT-PZT-Si together with a multi-electrode or thin film resistor coating used as the control electrode between Si and PZT and metallic films as grounding between the interface of PZT ceramics. A linear voltage is applied to the bimorph PZT optics by probing the control electrodes from a two-channel controllable power supplier. In doing so, the optics surface can achieve a desired third-order-polynomial surface. Reducing hysteresis and creep in bimorph PZT X-ray optics is the only feasible way by inserting an appropriate capacitor in series with bimorph PZT optics to significantly reduce both effects.

Original languageEnglish
Pages (from-to)294-297
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
StatePublished - 21 Jul 2001


  • Adaptive Optics
  • Bimorph PZT
  • Mirrors
  • Thin film resistor
  • X-ray optics

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