Design and fabrication of a near-field scanning optical microscope probe by CMOS-MEMS

C. H. Liou*, Yi Chiu, H. P.D. Shieh, Jin-Chern Chiou

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed.

Original languageEnglish
Title of host publication2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Pages168-169
Number of pages2
DOIs
StatePublished - 22 Nov 2012
Event2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 - Banff, AB, Canada
Duration: 6 Aug 20129 Aug 2012

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
CountryCanada
CityBanff, AB
Period6/08/129/08/12

Keywords

  • CMOS-MEMS
  • near-field scanning optical microscope
  • photodetector
  • side photodetector
  • transimpedance amplifier

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