This paper proposes a new modulation scheme using high order harmonic information to solve the so-called ambiguity problem of interferometry. To start with, we build a Fiber Fabry-Perot Interferometer to serve as a displacement sensor system, which has 70μm measurement range with 30nm RMS resolution. The experimental result shows that the proposed scheme has the ability to extend the measurement range beyond the limit of the wavelength while keeping the naturally high resolution of interferometry.
|Number of pages||5|
|State||Published - 16 Nov 2005|
|Event||Proceedings of the 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2005 - Monterey, CA, United States|
Duration: 24 Jul 2005 → 28 Jul 2005
|Conference||Proceedings of the 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2005|
|Period||24/07/05 → 28/07/05|