Design and analysis of an electro-thermally driven long-stretch micro drive with cascaded structure

Chen Peng Hsu, Wen Chuan Tai, Wen-Syang Hsu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Scopus citations

Abstract

A single micro actuator usually can provide only limited output force and displacement. Therefore, proper integration of several basic actuators into an arrayed structure becomes an attractive way to magnify the output. Here an electro-thermally driven large-stretch micro drive (LSMD) with cascaded compliant structure and compact size (about 2000μm x500μm) is designed and analyzed. Two kinds of materials, polysilicon and electroplated nickel, are used in finite element simulations. From simulations, several design parameters are found to have significant influence on the output displacements. The simulated output displacements can achieve over 100μm and 200μm for polysilicon-made and nickel-made LSMDs respectively. Larger out-stretching displacements are feasible by proper choice of design parameters. Preliminary fabrication and testing results of nickel-made LSMDs are also presented.

Original languageEnglish
Title of host publicationMicroelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages235-240
Number of pages6
ISBN (Print)0791836428, 9780791836422
DOIs
StatePublished - 1 Jan 2002

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings

Keywords

  • Cascaded structure
  • Compact size
  • Large displacement
  • Large force
  • Thermal actuator

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