Deposition of tantalum nitride thin films from ethylimidotantalum complex

Hsin-Tien Chiu*, Wen Ping Chang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

43 Scopus citations
Original languageEnglish
Pages (from-to)96-98
Number of pages3
JournalJournal of Materials Science Letters
Volume11
Issue number2
DOIs
StatePublished - 1 Jan 1992

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