Deposition of silicon carbide thin films from dodecamethylcyclohexasilane

Hsin-Tien Chiu*, Shu Fen Lee

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations
Original languageEnglish
Pages (from-to)1323-1325
Number of pages3
JournalJournal of Materials Science Letters
Volume10
Issue number22
DOIs
StatePublished - 1 Jan 1991

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