Defects in nonpolar (13 4 0) ZnO epitaxial film grown on (114) LaAlO3 substrate

Tzu Chun Yen, Wei Lin Wang, Chun Yen Peng, Jr Sheng Tian, Yen Teng Ho, Li Chang

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The defects in (1340)ZnO epitaxial film grown on (114)LaAlO3 (LAO) have been systematically investigated by using transmission electron microscopy. At the ZnO/LAO interface, the Burgers vectors of misfit dislocations are identified to be 1/3[1210] and 1/2[0001]. Threading dislocations with the Burgers vectors of 1/3«1120» and «0001» are distributed on the basal plane. In (1340)ZnO film, the predominant planar defects are basal stacking faults (BSFs) with 1/6«2023» displacement vectors. The densities of dislocations and BSFs are about 3.8 × 1010 cm-2 and 3.1 × 105 cm-1, respectively.

Original languageEnglish
Article number02B103
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number2
StatePublished - 1 Mar 2014

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