Deep ultraviolet laser direct write for patterning sol-gel InGaZnO semiconducting micro/nanowires and improving field-effect mobility

Hung Cheng Lin, Fabrice Stehlin, Olivier Soppera*, Hsiao-Wen Zan, Chang Hung Li, Fernand Wieder, Arnaud Ponche, Dominique Berling, Bo Hung Yeh, Kuan Hsun Wang

*Corresponding author for this work

Research output: Contribution to journalArticle

26 Scopus citations

Abstract

Deep-UV (DUV) laser was used to directly write indium-gallium-zinc-oxide (IGZO) precursor solution and form micro and nanoscale patterns. The directional DUV laser beam avoids the substrate heating and suppresses the diffraction effect. A IGZO precursor solution was also developed to fulfill the requirements for direct photopatterning and for achieving semi-conducting properties with thermal annealing at moderate temperature. The DUV-induced crosslinking of the starting material allows direct write of semi-conducting channels in thin-film transistors but also it improves the field-effect mobility and surface roughness. Material analysis has been carried out by XPS, FTIR, spectroscopic ellipsometry and AFM and the effect of DUV on the final material structure is discussed. The DUV irradiation step results in photolysis and a partial condensation of the inorganic network that freezes the sol-gel layer in a homogeneous distribution, lowering possibilities of thermally induced reorganization at the atomic scale. Laser irradiation allows high-resolution photopatterning and high-enough field-effect mobility, which enables the easy fabrication of oxide nanowires for applications in solar cell, display, flexible electronics, and biomedical sensors.

Original languageEnglish
Article number10490
JournalScientific reports
Volume5
DOIs
StatePublished - 27 May 2015

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    Lin, H. C., Stehlin, F., Soppera, O., Zan, H-W., Li, C. H., Wieder, F., Ponche, A., Berling, D., Yeh, B. H., & Wang, K. H. (2015). Deep ultraviolet laser direct write for patterning sol-gel InGaZnO semiconducting micro/nanowires and improving field-effect mobility. Scientific reports, 5, [10490]. https://doi.org/10.1038/srep10490