Critical point defect detection for small-pixel thin-film transistor array applied to medical display

Yao Chin Wang, Bor-Shyh Lin

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


Thin-film transistor (TFT) array testing technique has been used, which provides defect detection capability to control the yield of the TFT process. In the past, several defect inspection technologies have been developed and applied for the TFT array testing. When the TFT array pixel size is getting smaller and the resolution is higher, they also encounter the performance limitation on detecting the critical defect in this small-pixel TFT array and facing a limited testing requirement. For medical display applications, the display pixels on an array panel are getting smaller and smaller; therefore, defect detection is getting more important and critical for managing yield with quality. In this study, a novel approach for defect detection was proposed. Here, the proposed voltage imaging technique is used for the TFT array test, and it provides better small-pixel TFT array defect detection capability. The experimental results show that by using the voltage imaging technique, detecting critical point defect of TFT array can be effectively improved. And the detected small-pixel size of TFT array panels can be smaller than 55 μm of an advanced medical display.

Original languageEnglish
Pages (from-to)376-380
Number of pages5
JournalJournal of the Society for Information Display
Issue number9
StatePublished - 1 Sep 2013


  • TFT array
  • defect detection
  • medical display
  • small-pixel

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