Copper loaded on sol-gel-derived alumina adsorbents for phosphine removal

Jung Nan Hsu, Hsun-Ling Bai*, Shou Nan Li, Chuen-Tinn Tsai

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

The hydride gas of phosphine (PH3) is commonly used for semiconductor and optoelectronic industries. The local scrubbers must immediately abate it because of its high toxicity. In this study, copper (Cu) loaded on the sol-gel-derived γ-alumina (Al2O3) adsorbents are prepared and tested to investigate the possibility of PH3 removal and sorbent regeneration. Test results showed that during the breakthrough time of over 99% PH3 removal efficiency, the maximum adsorption capacity of Cu loaded on the sol-gel-derived γ-Al2O3 adsorbent is 18 mg-PH3/g-adsorbent. This is much higher than that of Cu loaded on the commercial γ-Al2O3 adsorbent - 8.6 mg-PH 3/g-adsorbent. The high specific surface area, narrow pore size distribution, and well dispersion of Cu loaded on the sol-gel-derived γ-Al2O3 could be the reasons for its high PH 3 adsorption capacity. The regeneration test shows that Cu loaded on the sol-gel-derived γ-Al2O3 adsorbent can be regenerated after a simple air purging procedure. The cumulative adsorption capacity for five regeneration cycles is 65 mg-PH3/g-adsorbent, which is approximately double that of the Cu/zeolite adsorbent demonstrated in the literature.

Original languageEnglish
Pages (from-to)629-635
Number of pages7
JournalJournal of the Air and Waste Management Association
Volume60
Issue number5
DOIs
StatePublished - 1 Jan 2010

Fingerprint Dive into the research topics of 'Copper loaded on sol-gel-derived alumina adsorbents for phosphine removal'. Together they form a unique fingerprint.

Cite this