Original language | English |
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Patent number | 6687112 |
State | Published - 3 Feb 2004 |
CONTROL SYSTEM FOR AN ELECTROSTATICALLY- DRIVEN MICROELECTROMECHANICAL DEVICE
Jin-Chern Chiou (Inventor)
Research output: Patent
Jin-Chern Chiou (Inventor)
Research output: Patent
Original language | English |
---|---|
Patent number | 6687112 |
State | Published - 3 Feb 2004 |