| Original language | English |
|---|---|
| Patent number | 6687112 |
| State | Published - 3 Feb 2004 |
CONTROL SYSTEM FOR AN ELECTROSTATICALLY- DRIVEN MICROELECTROMECHANICAL DEVICE
Jin-Chern Chiou (Inventor)
Research output: Patent
Jin-Chern Chiou (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | 6687112 |
| State | Published - 3 Feb 2004 |