CONTROL SYSTEM FOR AN ELECTROSTATICALLY- DRIVEN MICROELECTROMECHANICAL DEVICE

Jin-Chern Chiou (Inventor)

Research output: Patent

Original language	English
Patent number	6687112
State	Published - 3 Feb 2004

Cite this

Chiou, J-C. (2004). CONTROL SYSTEM FOR AN ELECTROSTATICALLY- DRIVEN MICROELECTROMECHANICAL DEVICE. (Patent No. 6687112).