Conformal deposition of Ni-P on anodic aluminum oxide template

Sheng Chieh Lin*, Chun Han Lai, Pu-Wei Wu

*Corresponding author for this work

Research output: Contribution to journalArticle

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A nanoporous semiconducting template was fabricated by conformal deposition of Ni-P over anodic aluminum oxide (AAO). Electroless plating was conducted in repeated steps of sensitization, activation, and deposition using NaH2 PO2 as a reducing agent. Variables including pH, temperature, time, and additive were studied for conformal deposition within the pore channels without clogging the openings prematurely. We demonstrated concentric Ni-P tubes with an inner diameter of 84 nm at 10 μm length. Resistivity of the AAO template was determined at 39.6 cm for through-channel direction. Incorporation of the semiconducting AAO structure with established template synthesis technologies opens up the opportunity for numerous devices.

Original languageEnglish
JournalElectrochemical and Solid-State Letters
Issue number1
StatePublished - 1 Jan 2008

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