Comprehensive study on reflectance of Si3N4 subwavelength structures for silicon solar cell applications using 3D finite element analysis

Zheng Liang Lu, Yiming Li*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this work, a full 3D finite element analysis for the silicon nitride (Si3N4) subwavelength structure (SWS) deposited on the antireflection coating (ARC) of a-Si thin film solar cell is conducted. We investigate the reflectance property of cylinder-, right circular cone-, and square pyramid shape of Si3N4 SWS with various heights and incident angles. The results show that the pyramid shape of SWS possesses the best reflectance property in the optical region from 400 nm to 1000 nm. Comparison with the RCWA work is also reported.

Original languageEnglish
Title of host publicationTechnical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011
Pages21-24
Number of pages4
StatePublished - 2011
EventNanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011 - Boston, MA, United States
Duration: 13 Jun 201116 Jun 2011

Publication series

NameTechnical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011
Volume2

Conference

ConferenceNanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011
CountryUnited States
CityBoston, MA
Period13/06/1116/06/11

Keywords

  • Antireflection coating
  • Finite element analysis
  • Morphological effect
  • Reflectance
  • Rigorous coupled-wave approach
  • Shape effect
  • Silicon nitride
  • Solar cell
  • Sub-Wavelength structure

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  • Cite this

    Lu, Z. L., & Li, Y. (2011). Comprehensive study on reflectance of Si3N4 subwavelength structures for silicon solar cell applications using 3D finite element analysis. In Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011 (pp. 21-24). (Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011; Vol. 2).