Compositional uniformity control on deposition of magneto-optical disk

Tzuan R. Jeng*, Vien S. Lo, Shiuh Chao, Tsai C. Hsiao, Der-Ray Huang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The rare earth-transition metal (RE-TM) alloys are widely accepted as the most suitable material for magneto-optical (MO) recording. The magnetic and optical properties of the recording media, hence the read-write-erase characteristics of the disk, are crucially dependent on the composition of the RE-TM films. Tailoring the composition of the films to meet the requirements in various magneto-optical recording applications is, therefore, important. In-line sputtering is the most common method for RE-TM film coating in disk production process. There are two common methods for fabricating sputter target; one is powder-sintering, the other is melt-casting. The former method yields a target composed of mixtures of pure element phases and certain percentage of intermetallic compound phases, the latter method yields a target composed of 100% intermetallic compound phases. The sputtering of RE-TM target often gives nonuniform composition distribution on the disk based on past experiences. This problem motivated us to study the sputtered atom distribution of the targets which were fabricated by different methods.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsFuxi Gan
PublisherPubl by Society of Photo-Optical Instrumentation Engineers
Pages14-16
Number of pages3
ISBN (Print)0819413143
DOIs
StatePublished - 1 Dec 1993
EventThird International Symposium on Optical Storage (ISOS 92) - Kunming, China
Duration: 15 Oct 199220 Oct 1992

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2053
ISSN (Print)0277-786X

Conference

ConferenceThird International Symposium on Optical Storage (ISOS 92)
CityKunming, China
Period15/10/9220/10/92

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  • Cite this

    Jeng, T. R., Lo, V. S., Chao, S., Hsiao, T. C., & Huang, D-R. (1993). Compositional uniformity control on deposition of magneto-optical disk. In F. Gan (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 14-16). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2053). Publ by Society of Photo-Optical Instrumentation Engineers. https://doi.org/10.1117/12.150663