Comparison of cleanroom samplers for inorganic airborne molecular contaminants

I. Kai Lin, Hsun-Ling Bai*, Cheng Chang Liu, Bi Jun Wu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

The performances of inorganic airborne molecular contaminants (AMCs) via silica gel tubes, impingers, and diffusion denuder sampler (DDS) were compared in a cleanroom. The results showed silica gel tubes were not applicable for cleanroom sampling due to high blanks. While with optimal sampling conditions both impingers and DDS have much better performances, of which DDS has the lowest detection limits of the method for HF, HCl, HNO2, HNO3, SO2, and NH3 gases to be 0.15, 0.11, 0.13, 0.03, 0.07, and 0.42g/m3, respectively. Results indicated no significant difference for the HF and SO42- concentrations made by the DDS and impingers.

Original languageEnglish
Pages (from-to)842-861
Number of pages20
JournalSeparation Science and Technology
Volume43
Issue number4
DOIs
StatePublished - 1 Mar 2008

Keywords

  • Airborne molecular contamination (AMC)
  • Cleanroom
  • Diffusion denuder sampler (DDS)
  • Impinger air sampler
  • Micro-contamination
  • Semiconductor device

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