CMOS-MEMS knife-edge optical spot profiling system

Yi Chiu*, T. L. Chang, C. H. Pan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The knife edge technique is commonly used to measure tightly focused optical spot profiles with sub-wavelength or nano-meter resolutions. In this paper, we demonstrate a micro scanning knife edge system by using the CMOS-MEMS technology. The scanning actuator, the photodetector, and the signal conditioning circuit, are all integrated and fabricated in the same device by the TSMC 0.35 μm 2P4M technology. The mechanical and electrical properties of various components in the system were characterized. Measurement of focused optical spot profiles at different wavelength and numerical apertures were successfully demonstrated.

Original languageEnglish
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1369-1372
Number of pages4
DOIs
StatePublished - 11 Dec 2009
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: 21 Jun 200925 Jun 2009

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

ConferenceTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period21/06/0925/06/09

Keywords

  • CMOS MEMS
  • Comb drive actuator
  • Knife edge
  • Photo detector

Fingerprint Dive into the research topics of 'CMOS-MEMS knife-edge optical spot profiling system'. Together they form a unique fingerprint.

Cite this