CMOS-MEMS based optical phase shifter array with high fill factor

Jin-Chern Chiou, C. C. Hung, L. J. Shieh, Z. L. Tsai

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

The proposed CMOS-MEMS optical phase shifter activates λ/4 vertical displacement with 3V driving voltages and achieves the mirror deformation within λ/10. The fill factor is 90% without the need of flip-chip bonding technology.

Original languageEnglish
Title of host publication2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages115-116
Number of pages2
DOIs
StatePublished - 16 Dec 2009
Event2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States
Duration: 17 Aug 200920 Aug 2009

Publication series

Name2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Conference

Conference2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
CountryUnited States
CityClearwater, FL
Period17/08/0920/08/09

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