CMOS-MEMS accelerometer with differential LC-tank oscillators

Yi Chiu*, Hao-Chiao Hong, Po Chih Wu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This paper presents a CMOS-MEMS accelerometer based on differential LC-tank oscillators. Two LC-tank oscillators composed of differential MEMS capacitors and suspended inductors were designed and fabricated by standard TSMC 0.18 μm CMOS processes and post-CMOS dry etching. The outputs of the differential oscillators are mixed and the output frequency of the mixer is proportional to the capacitance change caused by external acceleration. The device has been characterized and has a mechanical resonance frequency of 3.3 kHz, sensitivity of 3.7 MHz/g, and nonlinearity of 1.8%.

Original languageEnglish
Title of host publicationIEEE SENSORS 2012 - Proceedings
DOIs
StatePublished - 1 Dec 2012
Event11th IEEE SENSORS 2012 Conference - Taipei, Taiwan
Duration: 28 Oct 201231 Oct 2012

Publication series

NameProceedings of IEEE Sensors

Conference

Conference11th IEEE SENSORS 2012 Conference
CountryTaiwan
CityTaipei
Period28/10/1231/10/12

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