CMOS-Compatible precise placement of ge quantum dots for nanoelectronic, nanophotonic, and energy conversion devices

I. H. Chen, K. H. Chen, C. C. Wang, Pei-Wen Li

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We have developed a self-assembled CMOS compatible scheme for the generation of Ge QDs through thermal oxidation of Si1-xGex patterned structures as well as demonstrated precise QD placement by guiding Ge nucleus migration along the oxidation path and thus arranging them onto targeted locations where the ultimate oxidation occurs. Thereby a single QD self-aligned with electrodes through nanoscale tunnel barriers of SiO2/Si3N4 is realized for an effective management of single electron tunneling. On the other hand, using the fidelity of lithographic patterning and selective oxidation of SiGe pillars well-organized 3D stacked Ge QDs are precisely placed vertically and laterally, and the stacking number is managed by conditions of etching and layer deposition. Stacked QDs luminescence tunable over the visible and possess low thermal conductivity, showing promise for nanophotonic and energy conversion devices.

Original languageEnglish
Title of host publicationLow-Dimensional Nanoscale Electronic and Low-Dimensional Nanoscale Electronic and on Compound Semiconductors 54, SOTAPOCS 2012
Pages313-318
Number of pages6
Edition6
DOIs
StatePublished - 1 Dec 2012
EventSymposia on Low-Dimensional Nanoscale Electronic and Photonic Devices 5 and State-of-the-Art Program on Compound Semiconductors 2012, SOTAPOCS 54 - 222nd ECS Meeting/PRiME 2012 - Honolulu, HI, United States
Duration: 7 Oct 201212 Oct 2012

Publication series

NameECS Transactions
Number6
Volume50
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

ConferenceSymposia on Low-Dimensional Nanoscale Electronic and Photonic Devices 5 and State-of-the-Art Program on Compound Semiconductors 2012, SOTAPOCS 54 - 222nd ECS Meeting/PRiME 2012
CountryUnited States
CityHonolulu, HI
Period7/10/1212/10/12

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