CMOS-compatible generation of self-organized 3-D Ge quantum dot array for photonic and thermoelectric applications

Ching Chi Wang*, Kuan Hung Chen, Inn Hao Chen, Wei Ting Lai, Hung Tai Chang, Wen Yen Chen, Jung Chao Hsu, Shen Wei Lee, Tzu Min Hsu, Ming Tsung Hung, Pei-Wen Li

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

We demonstrate a CMOS-compatible scheme, selective oxidation of SiGe pillars, for creating well-organized 3-D Ge quantum dot (QD) array by guiding QDs migration along the oxidation path and thus placing them on targeted locations where the ultimate oxidation occurs. Stacked QDs exhibit tunable luminescence over the visible and possess low thermal conductivity, showing promise for nanophotonic and energy conversion devices.

Original languageEnglish
Article number6210389
Pages (from-to)657-660
Number of pages4
JournalIEEE Transactions on Nanotechnology
Volume11
Issue number4
DOIs
StatePublished - 17 Jul 2012

Keywords

  • Ge quantum dot (QD)
  • photonics
  • thermoelectrics (TE)

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