Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes

Jin-Chern Chiou*, Y. C. Lin, S. D. Wu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

11 Scopus citations

Abstract

The micromirror device that can achieve analog behavior plays a very important role in optical MEMS. However, traditional electrostatic micromirror device driven by a single electrode can not achieve the analog behavior due to its nonlinear transfer characteristic. In this regard, the concept of multiple-electrodes-controlled mirror device is proposed previously to overcome the above mentioned drawback. The experimental results have motivated us to make more efforts to improve the performance such as operating frequency of the proposed micromirror device. In order to increase the operating frequency, the transient behavior of the mirror must be improved first. In this article, we show that fuzzy control technology is a good candidate to improve the transient behavior of the proposed device.

Original languageEnglish
Title of host publication2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages85-86
Number of pages2
ISBN (Electronic)0780375955, 9780780375956
DOIs
StatePublished - 1 Jan 2002
EventIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland
Duration: 20 Aug 200223 Aug 2002

Publication series

Name2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
CountrySwitzerland
CityLugano
Period20/08/0223/08/02

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