@inproceedings{463031faf5a94ad6ac02b14ece2dd32e,
title = "Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes",
abstract = "The micromirror device that can achieve analog behavior plays a very important role in optical MEMS. However, traditional electrostatic micromirror device driven by a single electrode can not achieve the analog behavior due to its nonlinear transfer characteristic. In this regard, the concept of multiple-electrodes-controlled mirror device is proposed previously to overcome the above mentioned drawback. The experimental results have motivated us to make more efforts to improve the performance such as operating frequency of the proposed micromirror device. In order to increase the operating frequency, the transient behavior of the mirror must be improved first. In this article, we show that fuzzy control technology is a good candidate to improve the transient behavior of the proposed device.",
author = "Jin-Chern Chiou and Lin, {Y. C.} and Wu, {S. D.}",
year = "2002",
month = jan,
day = "1",
doi = "10.1109/OMEMS.2002.1031455",
language = "English",
series = "2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "85--86",
booktitle = "2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest",
address = "United States",
note = "null ; Conference date: 20-08-2002 Through 23-08-2002",
}