Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes

Jin-Chern Chiou; Y. C. Lin; S. D. Wu

doi:10.1109/OMEMS.2002.1031455

Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes

Jin-Chern Chiou^*, Y. C. Lin, S. D. Wu

^*Corresponding author for this work

National Chiao Tung University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

11 Scopus citations

Abstract

The micromirror device that can achieve analog behavior plays a very important role in optical MEMS. However, traditional electrostatic micromirror device driven by a single electrode can not achieve the analog behavior due to its nonlinear transfer characteristic. In this regard, the concept of multiple-electrodes-controlled mirror device is proposed previously to overcome the above mentioned drawback. The experimental results have motivated us to make more efforts to improve the performance such as operating frequency of the proposed micromirror device. In order to increase the operating frequency, the transient behavior of the mirror must be improved first. In this article, we show that fuzzy control technology is a good candidate to improve the transient behavior of the proposed device.

Original language	English
Title of host publication	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	85-86
Number of pages	2
ISBN (Electronic)	0780375955, 9780780375956
DOIs	https://doi.org/10.1109/OMEMS.2002.1031455
State	Published - 1 Jan 2002
Event	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland Duration: 20 Aug 2002 → 23 Aug 2002

Publication series

Name	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Conference

Conference	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
Country	Switzerland
City	Lugano
Period	20/08/02 → 23/08/02

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Chiou, J-C., Lin, Y. C., & Wu, S. D. (2002). Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest (pp. 85-86). [1031455] (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2002.1031455

Chiou, Jin-Chern ; Lin, Y. C. ; Wu, S. D. / Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes. 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. pp. 85-86 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).

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title = "Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes",

abstract = "The micromirror device that can achieve analog behavior plays a very important role in optical MEMS. However, traditional electrostatic micromirror device driven by a single electrode can not achieve the analog behavior due to its nonlinear transfer characteristic. In this regard, the concept of multiple-electrodes-controlled mirror device is proposed previously to overcome the above mentioned drawback. The experimental results have motivated us to make more efforts to improve the performance such as operating frequency of the proposed micromirror device. In order to increase the operating frequency, the transient behavior of the mirror must be improved first. In this article, we show that fuzzy control technology is a good candidate to improve the transient behavior of the proposed device.",

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Chiou, J-C, Lin, YC & Wu, SD 2002, Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes. in 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest., 1031455, 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest, Institute of Electrical and Electronics Engineers Inc., pp. 85-86, IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002, Lugano, Switzerland, 20/08/02. https://doi.org/10.1109/OMEMS.2002.1031455

Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes. / Chiou, Jin-Chern; Lin, Y. C.; Wu, S. D.

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. p. 85-86 1031455 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - The micromirror device that can achieve analog behavior plays a very important role in optical MEMS. However, traditional electrostatic micromirror device driven by a single electrode can not achieve the analog behavior due to its nonlinear transfer characteristic. In this regard, the concept of multiple-electrodes-controlled mirror device is proposed previously to overcome the above mentioned drawback. The experimental results have motivated us to make more efforts to improve the performance such as operating frequency of the proposed micromirror device. In order to increase the operating frequency, the transient behavior of the mirror must be improved first. In this article, we show that fuzzy control technology is a good candidate to improve the transient behavior of the proposed device.

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Chiou J-C, Lin YC, Wu SD. Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc. 2002. p. 85-86. 1031455. (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). https://doi.org/10.1109/OMEMS.2002.1031455