Abstract
Diamonds were synthesized on adamantane-coated mirror-polished Si (100) substrates by microwave plasma chemical vapor deposition (MPCVD) using a gas mixture of H2 and CH4. Before MPCVD deposition, Si substrates were dip-coated in chemical solutions of ethylene glycol and diethylene glycol with adamantane. With the coating of adamantane, the diamond nucleation can be enhanced with a density over 1 × 108 cm -2 and the deposited diamond films are shown to be of good crystallinity by scanning electron microscopy and Raman spectrometry. The study demonstrates a simple and efficient way of diamond deposition on a smooth Si substrate.
Original language | English |
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Pages (from-to) | 1514-1518 |
Number of pages | 5 |
Journal | RSC Advances |
Volume | 3 |
Issue number | 5 |
DOIs | |
State | Published - 7 Feb 2013 |