@inproceedings{4d889545ea9e43ff8cf21ba70b54cddc,
title = "Characterization of the low temperature activated P+/N junction formed by implant into silicide method",
author = "Kow-Ming Chang and Lin, {Jian Hong} and Yang, {Chih Hsiang}",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/ISDRS.2007.4422558",
language = "English",
isbn = "1424418917",
series = "2007 International Semiconductor Device Research Symposium, ISDRS",
booktitle = "2007 International Semiconductor Device Research Symposium, ISDRS",
note = "null ; Conference date: 12-12-2007 Through 14-12-2007",
}