MOCVD method has been used to grow optical coatings: Sc 2 O 3 is a high index transparent coating while Ta-doped SnO 2 is a transparent conductive oxide. Both films show dense packing and excellent properties. The influence of deposition temperature on the microstructure evolution and optical properties of Sc 2 O 3 films was investigated by X-ray diffraction, scanning electron microscopy and spectrophotometry. Nanocrystalline films were obtained with low transmittance but high refractive index and hardness. Ta-doped SnO 2 films showed sharp change of conductivity with Ta doping, which is attributed to the increase of electron carrier concentration. Improved crystallinity contributes to the improvement in the mobility among doped samples. Microstructural evaluation and property relationships are discussed.
|Number of pages||4|
|Journal||Materials Science and Engineering B: Solid-State Materials for Advanced Technology|
|State||Published - 25 May 2003|
|Event||Advanced Electronic-ceramic Materials. Proceedings of the 8th IUMRS-ICEM 2002 - Xi'an, China|
Duration: 10 Jun 2002 → 14 Jun 2002
- Sc O
- Ta-doped SnO