Characterization of MOCVD grown optical coatings of Sc 2 O 3 and Ta-doped SnO 2

S. W. Lee, A. Daga, Z. K. Xu, H. D. Chen*

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations


MOCVD method has been used to grow optical coatings: Sc 2 O 3 is a high index transparent coating while Ta-doped SnO 2 is a transparent conductive oxide. Both films show dense packing and excellent properties. The influence of deposition temperature on the microstructure evolution and optical properties of Sc 2 O 3 films was investigated by X-ray diffraction, scanning electron microscopy and spectrophotometry. Nanocrystalline films were obtained with low transmittance but high refractive index and hardness. Ta-doped SnO 2 films showed sharp change of conductivity with Ta doping, which is attributed to the increase of electron carrier concentration. Improved crystallinity contributes to the improvement in the mobility among doped samples. Microstructural evaluation and property relationships are discussed.

Original languageEnglish
Pages (from-to)134-137
Number of pages4
JournalMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Issue number1-3
StatePublished - 25 May 2003
EventAdvanced Electronic-ceramic Materials. Proceedings of the 8th IUMRS-ICEM 2002 - Xi'an, China
Duration: 10 Jun 200214 Jun 2002


  • Sc O
  • Ta-doped SnO

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