Characterization of micro resistance welding with electro-thermal actuator for micro assembly

Chun Wei Chang*, Wen-Syang Hsu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Optical MEMS devices rely on the micro assembly to achieve re-positioning, such as lifted up micro mirrors and lens and micro resistance welding benefits assembly of optical components. However, the characteristics of micro resistance welding are still unknown. The purpose of this study is to characterize micro resistance welding with electro-thermal actuator for micro assembly. In order to characterize influence of operation parameters on micro resistance welding, important parameters including contact pressure, contact resistance and electrical energy are calibrated. Further, welding strength provide robust join are also measured. The idea of resistance welding is based on generated heat by ohm's law to melt material. From measured results, contact resistance decreases with increasing contact pressure due to increasing contact area. The stronger welding strength can be achieved at a smaller initial contact resistance which means that a larger clamping force could enhance the welding strength. The maximum welding strength is 74.4 μN at 2.7 Ω. Further, welding energy affects yield significantly. At high welding energy, between 1 to 10 J, the yield can reach 100 %. The energy below 0.05 J would not generate adequate heat to weld structure.

Original languageEnglish
Title of host publicationReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
DOIs
StatePublished - 31 Mar 2008
EventReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII - San Jose, CA, United States
Duration: 21 Jan 200822 Jan 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6884
ISSN (Print)0277-786X

Conference

ConferenceReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
CountryUnited States
CitySan Jose, CA
Period21/01/0822/01/08

Keywords

  • Micro assembly
  • Micro resistance welding
  • Micro welding
  • Thermal assembly
  • Thermal fusion

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