Characterization of Al2O3/ZnO grown on Si substrate by plasma enhanced atomic layer deposition

Chen Chen Chung, Binh Tinh Tran, Kung Liang Lin, Ching Chiun Wang, Chien Chih Chen, Chih Yung Huang, Sheng Lang Lee, Edward Yi Chang

Research output: Contribution to journalArticlepeer-review

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Engineering & Materials Science