Characteristics of low-temperature-prepared (Ba, Sr)TiO3 films post treated by novel excimer laser annealing

Der Chi Shye*, Bi Shiou Chiou, Chuan Chou Hwang, Jyh Shin Chen, I. Wei Su, Chen Chia Chou, Huang-Chung Cheng

*Corresponding author for this work

Research output: Contribution to conferencePaper

Abstract

Thin (Ba0.5Sr0.5)TiO3 (BST) films were sputtered on Pt/TiN/Ti/Si multilayer substrates at very low temperature (150°C). A novel process, using wavelength 248-nm KrF excimer laser annealing (ELA), has been undertaken to implement barium strontium titanate (BST) films at a low process temperature of 300° C. The crystallinity and dielectric constant are greatly improved after ELA treatment. In this work, the variation of texture was investigated. Besides, the escaped oxygen atoms from BST films were detected in-situ using a residual gas analyzer (RGA) during ELA process. Thus, the degradation of upper surface is strongly influenced by the laser energy fluence for an ELA-BST film.

Original languageEnglish
Pages227-230
Number of pages4
StatePublished - 1 Dec 2002
EventProceedings of the 13th IEEE International Symposium on Applications of Ferroelectronics - Nara, Japan
Duration: 28 May 20021 Jun 2002

Conference

ConferenceProceedings of the 13th IEEE International Symposium on Applications of Ferroelectronics
CountryJapan
CityNara
Period28/05/021/06/02

Keywords

  • Excimer laser annealing
  • Low temperature
  • Residual gas analyzer (RGA)
  • Texture

Fingerprint Dive into the research topics of 'Characteristics of low-temperature-prepared (Ba, Sr)TiO<sub>3</sub> films post treated by novel excimer laser annealing'. Together they form a unique fingerprint.

  • Cite this

    Shye, D. C., Chiou, B. S., Hwang, C. C., Chen, J. S., Su, I. W., Chou, C. C., & Cheng, H-C. (2002). Characteristics of low-temperature-prepared (Ba, Sr)TiO3 films post treated by novel excimer laser annealing. 227-230. Paper presented at Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectronics, Nara, Japan.