The performances of flexible a-Si:H TFTs on stainless foil with and without silicon nitride passivation layer were discussed in this study. The experiment results indicated the reliability of a-Si:H TFTs with passivation layer under mechanical strains was improved. That's related to the hydrogen passivating effect during deposition and post-annealing process.
|Number of pages||3|
|State||Published - 1 Dec 2010|
|Event||17th International Display Workshops, IDW'10 - Fukuoka, Japan|
Duration: 1 Dec 2010 → 3 Dec 2010
|Conference||17th International Display Workshops, IDW'10|
|Period||1/12/10 → 3/12/10|