Carrier transportation mechanism of the TaN/HfO2/IL/Si structure with silicon surface fluorine implantation

Woei Cherng Wu, Chao Sung Lai*, Tzu Ming Wang, Jer Chyi Wang, Chih Wei Hsu, Ming Wen Ma, Wen Cheng Lo, Tien-Sheng Chao

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

24 Scopus citations

Fingerprint Dive into the research topics of 'Carrier transportation mechanism of the TaN/HfO<sub>2</sub>/IL/Si structure with silicon surface fluorine implantation'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science