(Ba,Sr)TiO3 thin films: Preparation, properties and reliability

Tseung-Yuen Tseng*

*Corresponding author for this work

Research output: Contribution to journalArticle

4 Scopus citations

Abstract

(Ba,Sr)TiO3 thin films are important capacitor materials for future gigabit era dynamic random access memory (DRAM) applications. This article reviews the technological aspects of BST films, including thin films deposition techniques, post annealing, physical, electrical and dielectric characteristics of the films, effects of bottom electrode materials, complex plane analysis of AC electrical, dielectric relaxation, and defect and reliability phenomena associated with the films. In addition, possible future developments are briefly summarized.

Original languageEnglish
Pages (from-to)1-13
Number of pages13
JournalFerroelectrics
Volume232
Issue number1-4
DOIs
StatePublished - 1 Jan 1999

Keywords

  • BST
  • Properties
  • Reliability
  • Thin films

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