Back-channel etched double layer in-W-O/In-W-Zn-O thin-film transistors

Zhcn Hao Li, Po Yi Kuo, Wen Tzu Chen, Po-Tsun Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The thin-film transistors (TFTs) with back-channel etched (BCE) type enable channel length to be narrow and reduce parasitic capacitances owing to its shorter overlaps between the gate and source/drain (S/D) electrodes. In this study, a high-performance BCE-type oxide thin-film transistor was proposed for investigation. A novel stacked double layer ln-W-0 (IWO)/In-W-Zn-0 (1WZO) channel structure was fabricated and developed. Respectively, IWZO exhibits a high resistance to back-channel etching damage and IWO channel achieve a high mobility. The double layer IWO/1WZO TFTs are promising candidates for driving active matrix organic light-emitting diode (AMOLED) and high resolution display applications in the future. The double layer IWO/IWZO TFTs with S/D pattern by H2O2 + KOH can exhibit the high-performance electrical characteristic. The field-effect mobility (pre)-21.1cm2/V-s. Subthreshold swing (S.S.)-0.15 V/dec, threshold voltage (Vth) ∼-0.092 V, and on/off ratio-4.88xl08 can be achieved.

Original languageEnglish
Title of host publicationECS Transactions
EditorsYue Kuo
PublisherElectrochemical Society Inc.
Pages111-114
Number of pages4
Edition11
ISBN (Electronic)9781607685395
DOIs
StatePublished - 1 Jan 2018
EventSymposium on Thin Film Transistor Technologies 14, TFTT 2018 - AiMES 2018, ECS and SMEQ Joint International Meeting - Cancun, Mexico
Duration: 30 Sep 20184 Oct 2018

Publication series

NameECS Transactions
Number11
Volume86
ISSN (Print)1938-6737
ISSN (Electronic)1938-5862

Conference

ConferenceSymposium on Thin Film Transistor Technologies 14, TFTT 2018 - AiMES 2018, ECS and SMEQ Joint International Meeting
CountryMexico
CityCancun
Period30/09/184/10/18

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    Li, Z. H., Kuo, P. Y., Chen, W. T., & Liu, P-T. (2018). Back-channel etched double layer in-W-O/In-W-Zn-O thin-film transistors. In Y. Kuo (Ed.), ECS Transactions (11 ed., pp. 111-114). (ECS Transactions; Vol. 86, No. 11). Electrochemical Society Inc.. https://doi.org/10.1149/08611.0111ecst