Automatic probe alignment for atomic force microscope

Shao-Kang Hung*, Chia Feng Tsai, Yu Po Hsu, Dai Jie Tzou, Meng Hu Lin, Li Chen Fu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

We built an atomic force microscope (AFM) system in combination with a robotic manipulator to help users in two rigorous talks: to load the probe and to align the optical detection path. A novel z-tracking optical design, which allows vertical probe scan is also proposed. This method will enhance the scan speed for massive samples.

Original languageEnglish
Title of host publicationProceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Pages909-912
Number of pages4
DOIs
StatePublished - 1 Dec 2005
Event2005 IEEE International Conference on Mechatronics, ICM '05 - Taipei, Taiwan
Duration: 10 Jul 200512 Jul 2005

Publication series

NameProceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Volume2005

Conference

Conference2005 IEEE International Conference on Mechatronics, ICM '05
CountryTaiwan
CityTaipei
Period10/07/0512/07/05

Keywords

  • Atomic force microscope
  • Automatic manipulation

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