@inproceedings{953225c18bb742ad87a683b18eef8afd,
title = "Automatic probe alignment for atomic force microscope",
abstract = "We built an atomic force microscope (AFM) system in combination with a robotic manipulator to help users in two rigorous talks: to load the probe and to align the optical detection path. A novel z-tracking optical design, which allows vertical probe scan is also proposed. This method will enhance the scan speed for massive samples.",
keywords = "Atomic force microscope, Automatic manipulation",
author = "Shao-Kang Hung and Tsai, {Chia Feng} and Hsu, {Yu Po} and Tzou, {Dai Jie} and Lin, {Meng Hu} and Fu, {Li Chen}",
year = "2005",
month = dec,
day = "1",
doi = "10.1109/ICMECH.2005.1529383",
language = "English",
isbn = "0780389980",
series = "Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05",
pages = "909--912",
booktitle = "Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05",
note = "null ; Conference date: 10-07-2005 Through 12-07-2005",
}