Automatic probe alignment for atomic force microscope

Shao-Kang Hung; Chia Feng Tsai; Yu Po Hsu; Dai Jie Tzou; Meng Hu Lin; Li Chen Fu

doi:10.1109/ICMECH.2005.1529383

Automatic probe alignment for atomic force microscope

Shao-Kang Hung^*, Chia Feng Tsai, Yu Po Hsu, Dai Jie Tzou, Meng Hu Lin, Li Chen Fu

^*Corresponding author for this work

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

We built an atomic force microscope (AFM) system in combination with a robotic manipulator to help users in two rigorous talks: to load the probe and to align the optical detection path. A novel z-tracking optical design, which allows vertical probe scan is also proposed. This method will enhance the scan speed for massive samples.

Original language	English
Title of host publication	Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Pages	909-912
Number of pages	4
DOIs	https://doi.org/10.1109/ICMECH.2005.1529383
State	Published - 1 Dec 2005
Event	2005 IEEE International Conference on Mechatronics, ICM '05 - Taipei, Taiwan Duration: 10 Jul 2005 → 12 Jul 2005

Publication series

Name	Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Volume	2005

Conference

Conference	2005 IEEE International Conference on Mechatronics, ICM '05
Country	Taiwan
City	Taipei
Period	10/07/05 → 12/07/05

Keywords

Atomic force microscope
Automatic manipulation

Access to Document

10.1109/ICMECH.2005.1529383

Link to publication in Scopus

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Cite this

Hung, S-K., Tsai, C. F., Hsu, Y. P., Tzou, D. J., Lin, M. H., & Fu, L. C. (2005). Automatic probe alignment for atomic force microscope. In Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05 (pp. 909-912). [1529383] (Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05; Vol. 2005). https://doi.org/10.1109/ICMECH.2005.1529383

@inproceedings{953225c18bb742ad87a683b18eef8afd,

title = "Automatic probe alignment for atomic force microscope",

abstract = "We built an atomic force microscope (AFM) system in combination with a robotic manipulator to help users in two rigorous talks: to load the probe and to align the optical detection path. A novel z-tracking optical design, which allows vertical probe scan is also proposed. This method will enhance the scan speed for massive samples.",

keywords = "Atomic force microscope, Automatic manipulation",

author = "Shao-Kang Hung and Tsai, {Chia Feng} and Hsu, {Yu Po} and Tzou, {Dai Jie} and Lin, {Meng Hu} and Fu, {Li Chen}",

year = "2005",

month = dec,

day = "1",

doi = "10.1109/ICMECH.2005.1529383",

language = "English",

isbn = "0780389980",

series = "Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05",

pages = "909--912",

booktitle = "Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05",

note = "null ; Conference date: 10-07-2005 Through 12-07-2005",

}

Hung, S-K, Tsai, CF, Hsu, YP, Tzou, DJ, Lin, MH & Fu, LC 2005, Automatic probe alignment for atomic force microscope. in Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05., 1529383, Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05, vol. 2005, pp. 909-912, 2005 IEEE International Conference on Mechatronics, ICM '05, Taipei, Taiwan, 10/07/05. https://doi.org/10.1109/ICMECH.2005.1529383

Automatic probe alignment for atomic force microscope. / Hung, Shao-Kang; Tsai, Chia Feng; Hsu, Yu Po; Tzou, Dai Jie; Lin, Meng Hu; Fu, Li Chen.

Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05. 2005. p. 909-912 1529383 (Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Tsai, Chia Feng

AU - Hsu, Yu Po

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AU - Lin, Meng Hu

AU - Fu, Li Chen

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AB - We built an atomic force microscope (AFM) system in combination with a robotic manipulator to help users in two rigorous talks: to load the probe and to align the optical detection path. A novel z-tracking optical design, which allows vertical probe scan is also proposed. This method will enhance the scan speed for massive samples.

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