Automatic assembly of quartz tuning fork and microcantilever

Chiao Hua Cheng*, Jian Hua Chen, Jen Yu Shieh, Shao-Kang Hung

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Conventional atomic force microscopes (AFMs) detect microcantilever deflection using an optical lever system. However, the complex mechanism of the optical lever system and the alignment of the laser spot on the microcantilever prevent such AFM systems from scanning large samples. AFM systems using a quartz tuning fork (QTF) as a force sensor have been proven feasible, and enhance compactness of the AFM system. This paper presents the automatic assembly of the QTF sensor and the microcantilever of commercial AFM probe using a visual servo method.

Original languageEnglish
Title of host publicationAIM 2012 - 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Conference Digest
Pages580-585
Number of pages6
DOIs
StatePublished - 5 Oct 2012
Event2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2012 - Kaohsiung, Taiwan
Duration: 11 Jul 201214 Jul 2012

Publication series

NameIEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Conference

Conference2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2012
CountryTaiwan
CityKaohsiung
Period11/07/1214/07/12

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