Atomic layer deposition of Pb(Zr,Ti)O x on 4H-SiC for metal-ferroelectric-insulator-semiconductor diodes

Feng Zhang, Ya Chuan Perng, Ju H. Choi, Tao Wu, Tien-Kan Chung, Gregory P. Carman, Christopher Locke, Sylvia Thomas, Stephen E. Saddow, Jane P. Chang*

*Corresponding author for this work

Research output: Contribution to journalArticle

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Physics & Astronomy