Assessment of fire protection performance of water mist applied in exhaust ducts for semiconductor fabrication process

Yi Liang Shu, Wei Jin Jeng, Chen Wei Chiu, Chiun-Hsun Chen*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


Fume exhaust pipes used in semiconductor facilities underwent a series of fire tests to evaluate the performance of a water mist system. The parameters considered were the amount of water that the mist nozzles used, the air flow velocity, the fire intensity and the water mist system operating pressure. In order to make a performance comparison, tests were also performed with a standard sprinkler system. The base case served as a reference and applied a single water mist nozzle (100 bar operating pressure, 7.31/min water volume flux and 200 μm mean droplet size) installed in the pipe (60 cm in diameter) subjected to a 350°C air flow with an average velocity of 2 m/s. In such a case, the temperature in the hot flow dropped sharply as the water mist nozzle was activated and reached a 60°C saturation point. Under the same operating conditions, four mist nozzles were applied, and made no further contribution to reducing the fire temperature compared with the case using only a single nozzle. Similar fire protection performances to that in the base case were still retained when the exhaust flow velocity increased to 3 m/s and the inlet air temperature was increased to 500°C due to a stronger input fire scenario, respectively. Changing to a water mist system produced a better performance than a standard sprinkler. With regard to the effect of operating pressure of water mist system, a higher operating pressure can have a better performance. The results above indicate that the droplet size in a water-related fire protection system plays a critical role.

Original languageEnglish
Pages (from-to)295-302
Number of pages8
JournalFire and Materials
Issue number5
StatePublished - 1 Sep 2005


  • Exhaust duct
  • Fire protection
  • Semiconductor
  • Water mist

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