Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation

Yi Chiu; Wei Zhi Huang; Jhong Wei Wu; Jin-Chern Chiou; Han Ping D. Shieh

doi:10.1109/OMEMS.2008.4607853

Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation

Yi Chiu^*, Wei Zhi Huang, Jhong Wei Wu, Jin-Chern Chiou, Han Ping D. Shieh

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.

Original language	American English
Title of host publication	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
Publisher	IEEE
Pages	110-111
Number of pages	2
ISBN (Print)	9781424419180
DOIs	https://doi.org/10.1109/OMEMS.2008.4607853
State	Published - 23 Oct 2008
Event	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, Germany Duration: 11 Aug 2008 → 14 Aug 2008

Publication series

Name	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Conference

Conference	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
Country	Germany
City	Freiburg
Period	11/08/08 → 14/08/08

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10.1109/OMEMS.2008.4607853

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Chiu, Y., Huang, W. Z., Wu, J. W., Chiou, J-C., & Shieh, H. P. D. (2008). Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation. In 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS (pp. 110-111). [4607853] (2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS). IEEE. https://doi.org/10.1109/OMEMS.2008.4607853

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title = "Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation",

abstract = "Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.",

author = "Yi Chiu and Huang, {Wei Zhi} and Wu, {Jhong Wei} and Jin-Chern Chiou and Shieh, {Han Ping D.}",

year = "2008",

month = oct,

day = "23",

doi = "10.1109/OMEMS.2008.4607853",

language = "American English",

isbn = "9781424419180",

series = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",

publisher = "IEEE",

pages = "110--111",

booktitle = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",

note = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS ; Conference date: 11-08-2008 Through 14-08-2008",

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Chiu, Y, Huang, WZ, Wu, JW, Chiou, J-C & Shieh, HPD 2008, Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation. in 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS., 4607853, 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS, IEEE, pp. 110-111, 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS, Freiburg, Germany, 11/08/08. https://doi.org/10.1109/OMEMS.2008.4607853

Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation. / Chiu, Yi; Huang, Wei Zhi; Wu, Jhong Wei; Chiou, Jin-Chern; Shieh, Han Ping D.

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. IEEE, 2008. p. 110-111 4607853 (2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Chiu, Yi

AU - Huang, Wei Zhi

AU - Wu, Jhong Wei

AU - Chiou, Jin-Chern

AU - Shieh, Han Ping D.

PY - 2008/10/23

Y1 - 2008/10/23

N2 - Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.

AB - Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.

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M3 - Conference contribution

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BT - 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

PB - IEEE

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Chiu Y, Huang WZ, Wu JW, Chiou J-C, Shieh HPD. Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation. In 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. IEEE. 2008. p. 110-111. 4607853. (2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS). https://doi.org/10.1109/OMEMS.2008.4607853

Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation

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