@inproceedings{214e99dc9fbb453099f465833cae3433,
title = "Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation",
abstract = "Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.",
author = "Yi Chiu and Huang, {Wei Zhi} and Wu, {Jhong Wei} and Jin-Chern Chiou and Shieh, {Han Ping D.}",
year = "2008",
month = oct,
day = "23",
doi = "10.1109/OMEMS.2008.4607853",
language = "English",
isbn = "9781424419180",
series = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",
pages = "110--111",
booktitle = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",
note = "null ; Conference date: 11-08-2008 Through 14-08-2008",
}