Assembly of 3D MEMS mirrors and scanners using compliant push pads

Yi Chiu, Yan Ting Wu, Hao-Chiao Hong

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Fingerprint Dive into the research topics of 'Assembly of 3D MEMS mirrors and scanners using compliant push pads'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science