Assembly of 3D MEMS mirrors and scanners using compliant push pads

Yi Chiu, Yan Ting Wu, Hao-Chiao Hong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper presents a novel assembly technique for 3D micro structures on the substrate. The technique is based on pushing the structure to rotate to a predefined angle by using a micro probe. A compliant push pad is used to fix the position of the assembled structures. No other latching mechanism is necessary and thus the push operation can be significantly simplified. Micro mirrors and scanners assembled by this technique are demonstrated.

Original languageEnglish
Title of host publicationOptical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
Pages27-28
Number of pages2
DOIs
StatePublished - 1 Dec 2013
Event2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan
Duration: 18 Aug 201322 Aug 2013

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
CountryJapan
CityKanazawa
Period18/08/1322/08/13

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  • Cite this

    Chiu, Y., Wu, Y. T., & Hong, H-C. (2013). Assembly of 3D MEMS mirrors and scanners using compliant push pads. In Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings (pp. 27-28). [6659042] (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMN.2013.6659042