AR-HPES study on chemical bonding states of high-κ/high-μ gate stacks for advanced CMOS

H. Nohira*, A. Komatsu, K. Yamashita, K. Kakushima, H. Iwai, K. Sawano, Y. Shiraki

*Corresponding author for this work

Research output: Contribution to journalArticle

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science