Approach to room temperature process - A novel thin liquid-phase deposited oxide

CF Yeh*, Shumin Lin

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

To continuously reduce dimensions, and increase reliability of devices, low-temperature process (LTP) is an important issue. Pursuing a novel LTP, room-temperature process can be as a norm. In this paper, as an approach to room-temperature process, the feasible technologies of versatile liquid-phase deposited oxide will be introduced.

Original languageEnglish
Title of host publicationPROCEEDINGS OF THE SYMPOSIUM ON SURFACE OXIDE FILMS
EditorsJA Bardwell
PublisherElectrochemical Society Inc.
Pages149-160
Number of pages12
ISBN (Print)1-56677-168-4
StatePublished - 1996
EventSymposium on Surface Oxide Films, at the Fall Meeting of the Electrochemical-Society-Inc - SAN ANTONIO
Duration: 7 Oct 19969 Oct 1996

Publication series

NameELECTROCHEMICAL SOCIETY SERIES
PublisherELECTROCHEMICAL SOCIETY INC
Volume96

Conference

ConferenceSymposium on Surface Oxide Films, at the Fall Meeting of the Electrochemical-Society-Inc
CitySAN ANTONIO
Period7/10/969/10/96

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