The application of Technology CAD simulations for development of 1C processes in foundry is presented. Examples include device design, Flash cell design and optical proximity correction for SRAM cell. The challenges of using TCAD tools in the 1C foundry is also discussed.
|Number of pages||5|
|Journal||IEICE Transactions on Electronics|
|State||Published - Aug 2000|
- Cmos device
- Flash, optical proximity correction