Application of on-wafer TRL calibration on the measurement of microwave properties of Ba 0.5Sr 0.5TiO 3 thin films

Hang Ting Lue*, Tseung-Yuen Tseng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

41 Scopus citations

Abstract

A series of Al/Ba 0.5Sr 0.5TiO 3(BST)/sapphire multi-layered coplanar waveguide (CPW) transmission lines of different geometries and thin-film configurations was fabricated. We employed an accurate on-wafer Through-Line-Reflect (TRL) calibration technique and quasi-TEM analysis to measure the dielectric constant, loss tangent, and tunability of BST thin films using this CPW structure. Experimental results show that the overall insertion loss is less than 3 dB/cm even at frequencies as high as 20 GHz, which is the lowest obtained to date for metal/BST CPW devices. This result indicates that, with optimized impedance matching, normal conductors are also possibly suitable for fabricating low-loss tunable phase-shifter devices.

Original languageEnglish
Article number971716
Pages (from-to)1640-1647
Number of pages8
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume48
Issue number6
DOIs
StatePublished - 1 Nov 2001

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