Antenna charging effects on the electrical characteristics of polysilicon gate during electron cyclotron resonance etching

Tzong Kuei Kang*, Shih Yuan Ueng, Bau Tong Dai, Liang Po Chen, Huang-Chung Cheng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Fingerprint Dive into the research topics of 'Antenna charging effects on the electrical characteristics of polysilicon gate during electron cyclotron resonance etching'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy